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* 자가 구동 압저항 캔틸레버 (piezo-resistive self-actuated cantilever)
* 필드 방출 주사 프로브 리소그래피
(FE-SPL, Field Emission-Scanning Probe Lithography)
* 팁 기반 전자빔 유도 증착
(TB-EBID, Tip-based Electron Beam Induced Deposition)
* 멀티 플랫폼 고진공 시스템(Multi-Plattform UHV System – AFM-MPS)
* Paper: Single dopant atom lithography
* Paper: RT single dopant atom QD transistor
* Paper: SPL towards single-digit nm fabrication




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